Authors - Surya Anugrah, Dwi Handarini, Eka Septariana Puspa, Windy Permata Suyono, Sabo Hermawan, Irima Rahmadani, Nazwa Febriyani Abstract - This paper presents the design, modelling, fabrication flow and analysis of multi-functional photonic crystal (PhC) nano-cavity sensors integrated with cantilever beams and diaphragms on a Silicon-On- Insulator (SOI) platform. The device architecture leverages defect-based two-dimensional PhC nano-cavities to obtain high quality (Q) factors and small mode volumes, while mechanically compliant structures transduce force and pressure into measurable optical resonance shifts. Biochemical and chemical detection is achieved via refractive-index based transduction and temperature sensing via thermo-optic effects. A machinelearning (ML)-assisted calibration and sensitivity enhancement framework is proposed to improve resolution and compensate for fabrication tolerances. Fi-nite-difference time-domain (FDTD) optical simulations and finite-element method (FEM) mechanical simulations validate device performance. Noise analysis, limit-of-detection (LOD) calculations, and comparison against state-of-the-art devices are provided. The architecture is CMOS-compatible and suitable for lab-on-chip photonic sensing applications.
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